Then I installed profiling tools on the separate x64 machine. Then I tryed to profile windows service.
I did all exactly as described in this article http://msdn.microsoft.com/en-us/library/ee707138.aspx
But after I try to attach with profiler the following error is appeared:
Error VSP1336: Could not attach to process ID:8352 MyProcess.exe. Profiling 64-bit processes is not supported by this version of the profiling tools. Please use the profiling tools from the x64 directory.
After you installed the x64 version profiler tool(ENU\vs_profiler_x64.exe) which downloaded form that web page, you can use the x64 version tool in this folder:\Program Files (x86)\Microsoft Visual Studio 10.0\Team Tools\Performance Tools\x64
The error is warning you because of you're using the x86 version tool profile the x64 process.